PULSED OPERATION OF A LIQUID-METAL ION-SOURCE

被引:5
作者
KISSEL, J [1 ]
ZSCHEEG, H [1 ]
RUDENAUER, FG [1 ]
机构
[1] AUSTRIAN RES CTR SEIBERSDORF,A-2444 SEIBERSDORF,AUSTRIA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 47卷 / 02期
关键词
D O I
10.1007/BF00618881
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:167 / 169
页数:3
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