DETERMINATION OF SODIUM IN ULTRAPURE SILICON AND SILICON DIOXIDE FILMS BY ACTIVATION ANALYSIS

被引：19

作者：

OSBORNE, JF

LARRABEE, GB

HARRAP, V

机构：

来源：

关键词：

D O I：

10.1021/ac60254a023

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：1144 / &

共 15 条

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