DESIGN OF 3-ELEMENT ELECTROSTATIC ELECTRON LENSES

被引:28
作者
HEDDLE, DWO
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1969年 / 2卷 / 12期
关键词
D O I
10.1088/0022-3735/2/12/308
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A procedure is described by which the focal properties of a three-element lens can be determined in terms of the properties of two-element lenses. Examples are given in some detail of the design of lenses to meet specific requirements and a graph is presented which can be used to design a lens of unit magnification which will work over a specified extreme voltage ratio in the range 6·25:1 to 170:1. The range of applicability of the method is discussed and a comparison made with measurements by Imhof and Read where only a limited agreement is expected. This comparison supports both the method and its limitations.
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页码:1046 / &
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