THEORY OF IMPLANTATION RECOIL ATOMS

被引：7

作者：

BETUGANOV, MA

DIGILOV, MU

KOSTIKOV, VI

KUMAKHOV, MA

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1980年 / 59卷 / 02期

关键词：

D O I：

10.1002/pssa.2210590251

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：835 / 842

页数：8

共 17 条

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BRICE, DK .

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OCONNELL, PA ;

PERKINS, JG ;

PONTET, FR ;

STROUD, PT .

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[3]

ISHIWARA H, 1976, INT C ION IMPLANTATI

[4] THE DISPLACEMENT OF ATOMS IN SOLIDS BY RADIATION [J].

KINCHIN, GH ;

PEASE, RS .

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[5]

KUMAKHOV MA, 1975, TABLE ION RANGE 1240

[6]

LINDHARD I, 1963, KONG DANSKE VID SELS, V33

[7]

MOLINE RA, 1976, ION IMPLANTATION SEM, P319

[8]

Nelson R. S., 1969, Radiation Effects, V2, P47, DOI 10.1080/00337576908235579

[9]

NISHI H, 1974, INT C ION IMPLANTATI, P450

[10] THE EFFECT OF CHANNELING ON DISPLACEMENT CASCADE THEORY [J].

OEN, OS ;

ROBINSON, MT .

APPLIED PHYSICS LETTERS, 1963, 2 (04) :83-85

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