MULTILAYER MODAL METHOD FOR DIFFRACTION GRATINGS OF ARBITRARY PROFILE, DEPTH, AND PERMITTIVITY

被引：311

作者：

LI, LF

机构：

[1] Optical Sciences Center, University of Arizona, Tucson, AZ

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1993年 / 10卷 / 12期

关键词：

D O I：

10.1364/JOSAA.10.002581

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A numerically stable method is presented for the analysis of diffraction gratings of arbitrary profile, depth, and permittivity in conical mountings. It is based on the classical modal method and uses a stack of lamellar grating layers to approximate an arbitrary profile. A numerical procedure known as the R-matrix propagation algorithm is used to propagate the modal fields through the layers. This procedure renders the implementation of this new method completely immune to the numerical instability that is associated with the conventional propagation algorithm. Numerical examples including diffraction efficiencies of both dielectric and metallic gratings of depths that range from subwavelength to hundreds of wavelengths are presented. Information about the convergence and the computation time of the method is also included.

引用

页码：2581 / 2591

页数：11

共 18 条

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