WETTABILITY STUDIES OF PLASMA-POLYMERIZED HEXAMETHYLDISILAZANE

被引：13

作者：

EIB, NK ^{[1
]}

MITTAL, KL ^{[1
]}

FRIEDRICHS, A ^{[1
]}

机构：

[1] IBM CORP,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 1980年 / 25卷 / 10期

关键词：

D O I：

10.1002/app.1980.070251030

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：2435 / 2438

页数：4

共 11 条

[1]

EIB NK, 1980, JUN COLL SURF SCI S

[2]

EIB NK, 1980, FEB ADH SOC M SAV

[3] SURVEY OF LOW-TEMPERATURE RF PLASMA POLYMERIZATION AND PROCESSING [J].

HAVENS, MR ;

BIOLSI, ME ;

MAYHAN, KG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02) :575-584

[4]

HIROTSU T, 1979, J APPL POLYM SCI, V24, P195

[5] MULTILAYER OPTICAL INTERFERENCE COATINGS VIA GLOW-DISCHARGE POLYMERIZATION TECHNIQUES [J].

LEE, JC .

APPLIED OPTICS, 1978, 17 (16) :2645-2647

[6] GLOW-DISCHARGE POLYMERIZATION OF ORGANIC SILICONES (E-10) [J].

SANDVED, JS ;

KRISTIANSEN, K .

VACUUM, 1977, 27 (04) :235-239

[7] ABSTRACT - ORGANIC POLYMER-FILMS FORMED IN AN RF DISCHARGE WITH APPLICATIONS FOR INTEGRATED OPTICS [J].

SMOLINSK.G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :33-33

[8] THIN ORGANOSILICON FILMS FOR INTEGRATED OPTICS [J].

TIEN, PK ;

SMOLINSKY, G ;

MARTIN, RJ .

APPLIED OPTICS, 1972, 11 (03) :637-+

[9]

WROBEL A, UNPUBLISHED

[10]

WROBEL AM, 1979, PLASMA POLYMERIZATIO, P237

← 1 2 →