EASY METHOD TO ACCURATELY ALIGN ION-BOMBARDMENT GUNS FOR DEPTH PROFILING IN AUGER-ELECTRON SPECTROSCOPY

被引:17
作者
SPRINGER, RW
HAAS, TW
GRANT, JT
HOOKER, MP
机构
[1] USN,AEROSP RES LABS,WRIGHT PATTERSON AFB,OH 45433
[2] UNIVERSAL ENERGY SYST INC,MEDWAY,OH 45341
关键词
D O I
10.1063/1.1686821
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1113 / 1114
页数:2
相关论文
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[2]   AUGER-ELECTRON EMISSION BY ION-BOMBARDMENT OF LIGHT METALS [J].
HENNEQUIN, JF ;
VIARISDE.P .
SURFACE SCIENCE, 1974, 42 (01) :50-60
[3]   USE OF AUGER-ELECTRON SPECTROSCOPY AND INERT-GAS SPUTTERING FOR OBTAINING CHEMICAL PROFILES [J].
PALMBERG, PW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :160-&