A MICROALIGNMENT SYSTEM FOR HIGH-PRECISION POSITIONING OF COLLIMATING PINHOLES

被引：2

作者：

FISCHER, W ^{[1
]}

RANDO, N ^{[1
]}

PEACOCK, A ^{[1
]}

VENN, R ^{[1
]}

机构：

[1] CAMBRIDGE MICROFAB LTD,CAMBRIDGE,ENGLAND

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 03期

关键词：

D O I：

10.1063/1.1145124

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A complete micropositioning unit based on high precision, manually controlled X-Y-Z translators, related metrology system, and sighting microscope is described. It has been specifically developed for the alignment of collimating pinholes (5-10 mum diam) on cryogenic x-ray detectors, 10-50 mum in size, deposited both on transparent and opaque substrates. The main characteristics of this flexible and convenient system are the capability to handle a complete test fixture ready for further measurements at cryogenic temperature, coupled with the possibility to verify the precision attained. Such microalignment equipment will find application in optical/UV/x-ray photon counting experiments, whenever a highly collimated illumination is required or in any test involving precision positioning of small experimental units onto microdevices or detectors.

引用

页码：603 / 607

页数：5

共 4 条

[1] THE PROPERTIES OF NIOBIUM SUPERCONDUCTING TUNNELING JUNCTIONS AS X-RAY-DETECTORS [J].