MICROMECHANICAL OPTICAL SWITCHING WITH VOLTAGE CONTROL USING SOI MOVABLE INTEGRATED OPTICAL WAVE-GUIDES

被引：8

作者：

ENG, TTH

SIN, SYS

KAN, SC

WONG, GKL

机构：

[1] Department of Physics, Hong Kong University of Science and Technology, Hong Kong, Clear Water Bay

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1995年 / 7卷 / 11期

关键词：

D O I：

10.1109/68.473477

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Optical switching is demonstrated using movable integrated optical waveguides fabricated on silicon-on-insulator substrates. The switching effect is produced by the voltage-controlled micromechanical deflection of the movable waveguides. The dynamic response of the deflection is studied. A contrast ratio of 12 dB of switching is obtained using an applied voltage of less than 10 V. At 20 V, the contrast ratio is about 40 dB.

引用

页码：1297 / 1299

页数：3

共 9 条

[1]

BRYZEK J, 1994, IEEE SPECTRUM MAY, P20

[2]

ENG TTH, 1995, 8TH INT C SOL STAT S

[3] FIBEROPTIC 1X6 SWITCH WITH SMOOTH TRANSMISSION SPECTRUM [J].