DEPOSITION OF TITANIUM NITRIDE BY VAPOR-PHASE REACTION

被引：9

作者：

TAKAHASHI, T ^{[1
]}

SUZUKI, Y ^{[1
]}

机构：

[1] NAGOYA UNIV, FAC ENGN, DEPT APPL CHEM, CHIKUSA 464, NAGOYA, JAPAN

来源：

关键词：

D O I：

10.1246/nikkashi.1974.1043

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：1043 / 1047

页数：5

共 6 条

[1] A method for the purification of the elements with a high melting point carbide, nitride and boride as well as description of some of their characteristics
Agte, C
Moers, K
[J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1931, 198 (03): : 233 - 275
[2] AIVAZOV MI, 1967, IAN SSSR NEORG MATER, V3, P2109
[3] THE VAPOR-PHASE DEPOSITION OF REFRACTORY MATERIALS .1. GENERAL CONDITIONS AND APPARATUS
CAMPBELL, IE
POWELL, CF
NOWICKI, DH
GONSER, BW
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1949, 96 (05) : 318 - 333
[4] MUNSTER A, 1953, Z ELEKTROCHEM, V57, P564
[5] THE GROWTH OF TITANIUM NITRIDE ON HOT FILAMENTS
POLLARD, FH
WOODWARD, P
[J]. JOURNAL OF THE CHEMICAL SOCIETY, 1948, (OCT): : 1709 - 1713
[6] VAPOUR-PHASE CRYSTALLIZATION AND SOME PHYSICAL PROPERTIES OF TITANIUM NITRIDE
SYNIELNIKOWA, W
NIEMYSKI, T
PANCZYK, J
KIERZEKP.E
[J]. JOURNAL OF THE LESS-COMMON METALS, 1971, 23 (01): : 1 - +