PREPARATION, COMPOSITION AND SOME PROPERTIES OF CODEPOSITED TIB2-TICX-COATINGS

被引：6

作者：

BARTSCH, K

LEONHARDT, A

WOLF, E

SCHONHERR, M

机构：

[1] Central Institute of Solid State Physics and Material Science, Dresden, 0-8027

来源：

JOURNAL OF MATERIALS SCIENCE | 1991年 / 26卷 / 16期

关键词：

D O I：

10.1007/BF00543645

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Heterogeneous TiC(x) and TiB2 containing layers have been deposited from the gas phase onto hard metal and tantalum substrates in a cold wall reactor. The process parameters were thermodynamically calculated and verified by experiments. The deposited layers have been characterized regarding the chemical composition, structure, microhardness and abrasion wear. In a large composition range a characteristic layer structure is observed. Microhardness and abrasion wear run in dependence on the layer composition through a peak factor.

引用

页码：4318 / 4322

页数：5

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