AFM IMAGING WITH AN XY-MICROPOSITIONER WITH INTEGRATED TIP

被引：42

作者：

INDERMUHLE, PF ^{[1
]}

JAECKLIN, VP ^{[1
]}

BRUGGER, J ^{[1
]}

LINDER, C ^{[1
]}

DEROOIJ, NF ^{[1
]}

BINGGELI, M ^{[1
]}

机构：

[1] SWISS CTR ELECTR & MICROTECHNOL INC,CH-2000 NEUCHATEL,SWITZERLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 47卷 / 1-3期

关键词：

ATOMIC FORCE MICROSCOPY; XY-MICROPOSITIONER;

D O I：

10.1016/0924-4247(94)00962-H

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, has been actuated and characterized and, for the first time with such a microtool, an atomic force microscope (AFM) profile has been achieved.

引用

页码：562 / 565

页数：4

共 6 条

[1] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[2] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].

BINNING, G ;

ROHRER, H ;

GERBER, C ;

WEIBEL, E .

PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61

[3] SILICON CANTILEVERS AND TIPS FOR SCANNING FORCE MICROSCOPY [J].

BRUGGER, J ;

BUSER, RA ;

DEROOIJ, NF .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 34 (03) :193-200

[4] DESIGN AND FABRICATION OF AN OVERHANGING XY-MICROACTUATOR WITH INTEGRATED TIP FOR SCANNING SURFACE PROFILING [J].

INDERMUEHLE, PF ;

LINDER, C ;

BRUGGER, J ;

JAECKLIN, VP ;

DEROOIJ, NF .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :346-350

[5]

Jaecklin V. P., 1992, Journal of Micromechanics and Microengineering, V2, P250, DOI 10.1088/0960-1317/2/4/006

[6]

MACDONALD NC, 1993, 7 INT C SOL STAT SEN, P8

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