SIMULTANEOUS SIMS, EID, AND FLASH-FILAMENT INVESTIGATIONS OF INTERACTION OF GASES WITH A TUNGSTEN SURFACE

被引：30

作者：

BENNINGHOVEN, A

TREITZ, N

LOEBACH, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 02期

关键词：

D O I：

10.1116/1.1317728

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：600 / +

页数：1

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