ANALYTIC WAVE-GUIDE SOLUTIONS AND THE COHERENCE PROBE MICROSCOPE

被引：6

作者：

DAVIDSON, MP

机构：

[1] Spectel Company, KLA Instruments Corporation, CA 94306, 415 Cambridge Ave

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(91)90146-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

[No abstract available]

引用

页码：523 / 526

页数：4

共 8 条

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[2]

Nyyssonen, Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory, Journal of the Optical Society of America A, 5 A, pp. 1270-1280, (1988)

[3]

Kirk, Precision Measurement of Microscope Images, PhD Thesis, (1985)

[4]

Yuan, Modeling of Optical Alignment and Metrology in VLSI Manufacturing, PhD Thesis, (1989)

[5]

Wojcik, Et al., Calculation of Light Scatter..., SPIE, 774, (1987)

[6]

Dirac, The Principles of Quantum Mechanics, (1987)

[7]

Davidson, Kaufman, Mazor, Cohen, An Application of Interference Microscopy..., SPIE, 775, (1987)

[8]

Born, Wolfe, Principles of Optics, (1980)

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