CRITICAL LAYER THICKNESS FOR SELF-ASSEMBLED INAS ISLANDS ON GAAS

被引:927
作者
LEONARD, D
POND, K
PETROFF, PM
机构
[1] Materials Department, University of California, Santa Barbara
来源
PHYSICAL REVIEW B | 1994年 / 50卷 / 16期
关键词
D O I
10.1103/PhysRevB.50.11687
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Using atomic force microscopy (AFM), we have directly observed the progression of surface morphology of InAs deposited by molecular-beam epitaxy on GaAs(100). InAs self-assembled dots (coherent) or relaxed InAs islands (incoherent) are formed depending on the InAs coverage. The InAs coverage was varied continuously and AFM was used to monitor in detail the nucleation and resulting size and shape transition of the InAs self-assembled dots. Dots of uniform size were observed only at the initial stages of this Stranski-Krastanow growth-mode transition. The self-assembled dot density increased very abruptly with total deposited amount of InAs. Treating this InAs growth-mode transition as a first-order phase transition with InAs total coverage as the critical parameter, we extract a critical thickness for surface elastic relaxation of 1.50 ML. © 1994 The American Physical Society.
引用
收藏
页码:11687 / 11692
页数:6
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