X-RAY CHARACTERIZATION OF AU/NI MULTILAYER THIN-FILMS

被引：11

作者：

CHAUDHURI, J ^{[1
]}

ALYAN, SM ^{[1
]}

JANKOWSKI, AF ^{[1
]}

机构：

[1] LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

来源：

THIN SOLID FILMS | 1992年 / 219卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90724-P

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Au/Ni multilayer thin films of single phase structure were analyzed using kinetmatic X-ray diffraction theories to determine the composition modulation and structure of this multilayer system. The repeat period of the multilayers used in this study ranged from 0.82 x 10(-9) m to 4.26 x 10(-9) m. The composition modulation was found to be a near square wave. The strain at the Au-Ni interface is predicted to be 9.8% at repeat period 1.65 x 10(-9) m with decreasing values above and below this repeat period.

引用

页码：63 / 68

页数：6

共 12 条

[1]

[Anonymous], 1985, SYNTHETIC MODULATED

[2]

CHAUDHURI J, 1991, MATER RES SOC SYMP P, V208, P211

[3]

DOW JD, 1987, MATER RES SOC S P, V77

[4] X-RAY-DIFFRACTION STUDY OF INTER-DIFFUSION AND GROWTH IN (GAAS)N(AIAS)M MULTILAYERS [J].

FLEMING, RM ;

MCWHAN, DB ;

GOSSARD, AC ;

WIEGMANN, W ;

LOGAN, RA .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) :357-363

[5]

Guinier A, 1952, ACTA CRYST, DOI DOI 10.1107/S0365110X53002143

[6]

HOVE MA, 1985, SPRINGER SERIES SURF, V2

[7]

JAMNKOWSKI AF, 1989, MAT SCI ENG A-STRUCT, V114, pL17

[8] LATTICE SPACING VARIATIONS IN GOLD-NICKEL SUPERLATTICES [J].

JANKOWSKI, AF .

SUPERLATTICES AND MICROSTRUCTURES, 1989, 6 (04) :427-429

[9] X-RAY DIFFRACTION FROM ONE-DIMENSIONAL SUPERLATTICES IN GAAS1-XPX CRYSTALS [J].

SEGMULLER, A ;

BLAKESLEE, AE .

JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1973, 6 (FEB1) :19-25

[10]

TSAKALAKOS T, 1977, THESIS NW U

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