OXIDATION OF TITANIUM FILMS SATURATED WITH NITROGEN AT 300 K

被引:4
作者
OUTLAW, RA
BROCK, FJ
机构
[1] NASA,LANGLEY RES CTR,HAMPTON,VA 23665
[2] OLD DOMINION UNIV,PHY DEPT,NORFOLK,VA 23508
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 02期
关键词
Compendex;
D O I
10.1116/1.1317854
中图分类号
O59 [应用物理学];
学科分类号
摘要
FILMS
引用
收藏
页码:532 / 534
页数:3
相关论文
共 11 条
[1]  
BIRYUKOVA NE, 1971, RUSS J PHYS CHEM+, V45, P411
[2]   THE CALORIMETRIC DETERMINATION OF THE HEATS OF ADSORPTION OF OXYGEN ON EVAPORATED METAL FILMS [J].
BRENNAN, D ;
HAYWARD, DO ;
TRAPNELL, BMW .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 256 (1284) :81-105
[3]   THE THERMODYNAMIC PROPERTIES OF THE OXIDES AND THEIR VAPORIZATION PROCESSES [J].
BREWER, L .
CHEMICAL REVIEWS, 1953, 52 (01) :1-75
[4]  
GUREVICH YG, 1969, IZVEST VUZ CHERNAYA, V4, P10
[5]  
HANSEN N, 1962, VAKUUMTECHNIK, V11, P70
[6]  
HARRA DJ, 1967, NUOVO CIMENTO S, V5, P57
[7]   HEATS OF FORMATION OF HAFNIUM OXIDE AND HAFNIUM NITRIDE [J].
HUMPHREY, GL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1953, 75 (12) :2806-2807
[10]   ADSORPTION SURFACE REACTION AND MUTUAL DISPLACEMENT OF CO CO2 AND O2 ON TITANIUM FILM [J].
KAWASAKI, K ;
SUGITA, T ;
EBISAWA, S .
SURFACE SCIENCE, 1967, 7 (03) :502-&