ELLIPSOMETRIC AND THERMOREFLECTANCE SPECTRA OF EPITAXIAL INSB FILMS

被引:5
作者
ADACHI, S
MIYAZAKI, T
机构
[1] Department of Electronic Engineering, Faculty of Engineering, Gunma University, Kiryu-shi
关键词
D O I
10.1103/PhysRevB.51.14317
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have measured spectroscopic-ellipsometry (SE) and thermoreflectance (TR) spectra of epitaxial InSb film sputter-deposited on a (0001) sapphire substrate in the 1.5-5.5-eV photon-energy range at room temperature. These data are analyzed on the basis of a simplified model of the interband transitions. Results are in satisfactory agreement with the experimental data over the entire range of photon energies. The finding definitely links the temperature-induced change in the dielectric function (TR) to the first derivative of the unperturbed dielectric function (SE). The importance of the fractional coefficients α and β has also been demonstrated for a reliable interpretation of the observed TR line shapes. © 1995 The American Physical Society.
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页码:14317 / 14323
页数:7
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