PROPERTIES OF LASER-SPUTTERED TI/BE MULTILAYERS

被引：23

作者：

RENNER, O

KOPECKY, M

KROUSKY, E

SCHAFERS, F

MULLER, BR

CHKHALO, NI

机构：

[1] MAX PLANCK GESELL, FRITZ HABER INST, W-1000 BERLIN 33, GERMANY

[2] NUCL PHYS INST, NOVOSIBIRSK 630090, USSR

[3] BERLIN ELECTRON STORAGE RING SYNCHROTRON RADIAT, W-1000 BERLIN 33, GERMANY

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1143047

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Characteristics of Ti/Be multilayers deposited by laser sputtering were investigated by grazing incidence x-ray reflection. The reflectivity of mirrors was explained using exponential variation of dielectric function, the validity of scattering model was confirmed by synchrotron radiation reflectivity measurements at 1200 eV. The observed quasi-Bragg peaks were interpreted in terms of nonspecular scattering from interfacial roughness.

引用

页码：1478 / 1481

页数：4

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