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SELECTIVE ETCHING OF GAAS AND AL0.30GA0.70AS WITH CITRIC-ACID HYDROGEN-PEROXIDE SOLUTIONS
被引:75
作者
:
JUANG, C
论文数:
0
引用数:
0
h-index:
0
JUANG, C
KUHN, KJ
论文数:
0
引用数:
0
h-index:
0
KUHN, KJ
DARLING, RB
论文数:
0
引用数:
0
h-index:
0
DARLING, RB
机构
:
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
|
1990年
/ 8卷
/ 05期
关键词
:
D O I
:
10.1116/1.584928
中图分类号
:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号
:
0808 ;
0809 ;
摘要
:
引用
收藏
页码:1122 / 1124
页数:3
相关论文
共 7 条
[1]
KENEFICK K, 1982, J ELECTROCHEM SOC, V129, P2380, DOI 10.1149/1.2123532
[2]
AN IMPROVED TECHNIQUE FOR SELECTIVE ETCHING OF GAAS AND GA1-XALXAS
LEPORE, JJ
论文数:
0
引用数:
0
h-index:
0
LEPORE, JJ
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(12)
: 6441
-
6442
[3]
EXTREMELY LOW-INTENSITY OPTICAL NONLINEARITY IN ASYMMETRIC COUPLED QUANTUM-WELLS
LITTLE, JW
论文数:
0
引用数:
0
h-index:
0
LITTLE, JW
WHISNANT, JK
论文数:
0
引用数:
0
h-index:
0
WHISNANT, JK
LEAVITT, RP
论文数:
0
引用数:
0
h-index:
0
LEAVITT, RP
WILSON, RA
论文数:
0
引用数:
0
h-index:
0
WILSON, RA
[J].
APPLIED PHYSICS LETTERS,
1987,
51
(22)
: 1786
-
1788
[4]
OPTICAL WAVEGUIDES IN GAAS-AIGAAS EPITAXIAL LAYERS
LOGAN, RA
论文数:
0
引用数:
0
h-index:
0
机构:
BELL LABS,MURRAY HILL,NJ 07974
BELL LABS,MURRAY HILL,NJ 07974
LOGAN, RA
REINHART, FK
论文数:
0
引用数:
0
h-index:
0
机构:
BELL LABS,MURRAY HILL,NJ 07974
BELL LABS,MURRAY HILL,NJ 07974
REINHART, FK
[J].
JOURNAL OF APPLIED PHYSICS,
1973,
44
(09)
: 4172
-
4176
[5]
ELECTRIC-FIELD DEPENDENCE OF OPTICAL-ABSORPTION NEAR THE BAND-GAP OF QUANTUM-WELL STRUCTURES
MILLER, DAB
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
MILLER, DAB
CHEMLA, DS
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
CHEMLA, DS
DAMEN, TC
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
DAMEN, TC
GOSSARD, AC
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
GOSSARD, AC
WIEGMANN, W
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
WIEGMANN, W
WOOD, TH
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
WOOD, TH
BURRUS, CA
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
BURRUS, CA
[J].
PHYSICAL REVIEW B,
1985,
32
(02)
: 1043
-
1060
[6]
PREFERENTIAL ETCHING OF GAAS THROUGH PHOTORESIST MASKS
OTSUBO, M
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
OTSUBO, M
ODA, T
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
ODA, T
KUMABE, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
KUMABE, H
MIKI, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MIKI, H
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1976,
123
(05)
: 676
-
680
[7]
THE RESONANT-TUNNELING FIELD-EFFECT TRANSISTOR - A NEW NEGATIVE TRANSCONDUCTANCE DEVICE
SEN, S
论文数:
0
引用数:
0
h-index:
0
SEN, S
CAPASSO, F
论文数:
0
引用数:
0
h-index:
0
CAPASSO, F
BELTRAM, F
论文数:
0
引用数:
0
h-index:
0
BELTRAM, F
CHO, AY
论文数:
0
引用数:
0
h-index:
0
CHO, AY
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1987,
34
(08)
: 1768
-
1773
←
1
→
共 7 条
[1]
KENEFICK K, 1982, J ELECTROCHEM SOC, V129, P2380, DOI 10.1149/1.2123532
[2]
AN IMPROVED TECHNIQUE FOR SELECTIVE ETCHING OF GAAS AND GA1-XALXAS
LEPORE, JJ
论文数:
0
引用数:
0
h-index:
0
LEPORE, JJ
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(12)
: 6441
-
6442
[3]
EXTREMELY LOW-INTENSITY OPTICAL NONLINEARITY IN ASYMMETRIC COUPLED QUANTUM-WELLS
LITTLE, JW
论文数:
0
引用数:
0
h-index:
0
LITTLE, JW
WHISNANT, JK
论文数:
0
引用数:
0
h-index:
0
WHISNANT, JK
LEAVITT, RP
论文数:
0
引用数:
0
h-index:
0
LEAVITT, RP
WILSON, RA
论文数:
0
引用数:
0
h-index:
0
WILSON, RA
[J].
APPLIED PHYSICS LETTERS,
1987,
51
(22)
: 1786
-
1788
[4]
OPTICAL WAVEGUIDES IN GAAS-AIGAAS EPITAXIAL LAYERS
LOGAN, RA
论文数:
0
引用数:
0
h-index:
0
机构:
BELL LABS,MURRAY HILL,NJ 07974
BELL LABS,MURRAY HILL,NJ 07974
LOGAN, RA
REINHART, FK
论文数:
0
引用数:
0
h-index:
0
机构:
BELL LABS,MURRAY HILL,NJ 07974
BELL LABS,MURRAY HILL,NJ 07974
REINHART, FK
[J].
JOURNAL OF APPLIED PHYSICS,
1973,
44
(09)
: 4172
-
4176
[5]
ELECTRIC-FIELD DEPENDENCE OF OPTICAL-ABSORPTION NEAR THE BAND-GAP OF QUANTUM-WELL STRUCTURES
MILLER, DAB
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
MILLER, DAB
CHEMLA, DS
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
CHEMLA, DS
DAMEN, TC
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
DAMEN, TC
GOSSARD, AC
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
GOSSARD, AC
WIEGMANN, W
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
WIEGMANN, W
WOOD, TH
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
WOOD, TH
BURRUS, CA
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS, MURRAY HILL, NJ 07974 USA
BURRUS, CA
[J].
PHYSICAL REVIEW B,
1985,
32
(02)
: 1043
-
1060
[6]
PREFERENTIAL ETCHING OF GAAS THROUGH PHOTORESIST MASKS
OTSUBO, M
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
OTSUBO, M
ODA, T
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
ODA, T
KUMABE, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
KUMABE, H
MIKI, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MIKI, H
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1976,
123
(05)
: 676
-
680
[7]
THE RESONANT-TUNNELING FIELD-EFFECT TRANSISTOR - A NEW NEGATIVE TRANSCONDUCTANCE DEVICE
SEN, S
论文数:
0
引用数:
0
h-index:
0
SEN, S
CAPASSO, F
论文数:
0
引用数:
0
h-index:
0
CAPASSO, F
BELTRAM, F
论文数:
0
引用数:
0
h-index:
0
BELTRAM, F
CHO, AY
论文数:
0
引用数:
0
h-index:
0
CHO, AY
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1987,
34
(08)
: 1768
-
1773
←
1
→