DEPTH PROFILING BY XFA WITH SELECTIVE EXCITATION AND VARIATION OF INCIDENCE AND TAKE-OFF ANGLE OF X-RAYS

被引：3

作者：

EBEL, H ^{[1
]}

EBEL, MF ^{[1
]}

SVAGERA, R ^{[1
]}

HELLER, M ^{[1
]}

POHN, C ^{[1
]}

KAITNA, R ^{[1
]}

机构：

[1] ROKAPPA LABORINSTRUMENTE GMBH,A-1120 VIENNA,AUSTRIA

来源：

X-RAY SPECTROMETRY | 1993年 / 22卷 / 04期

关键词：

D O I：

10.1002/xrs.1300220424

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

A method for the determination of the composition and thickness of thin AlxGa1-xAs films on GaAs substrates by means of energy-dispersive XFA with variable x-ray geometry and with selective excitation of characteristic sample radiations is developed. It can be applied without reference samples. The method was derived from XFA with variable take-off angle. An outline of the theory of the method and the evaluation of measured characteristic signals for an unknown composition x and thickness D of the films is given. This method can be applied to the determination of the compositions and thicknesses of thin multi-element films.

引用

页码：305 / 311

页数：7

共 12 条

[1] X-RAY-FLUORESCENCE YIELDS, AUGER, AND COSTER-KRONIG TRANSITION PROBABILITIES [J].