ELECTROMAGNETIC DIFFRACTION ANALYSIS OF 2-DIMENSIONAL GRATINGS

Several rigorous diffraction theories for classical gratings have been presented in the literature. However, only few approaches can be found on the analysis of gratings which are periodic in two dimensions. A system is derived of differential equations which applies to two-dimensional periodic structures. It can be solved by an extension of a technique suggested for the diffraction analysis of one-dimensional gratings, which is usually referred to as coupled-wave method. The formalism is characterized by its convenience. Results are compared with those obtained by other methods.