ELECTRONIC SPUTTERING FROM RARE-GAS SOLIDS

The different models for ground-state and excited-state atom ejection from pure and doped rare-gas solids under primary electronic excitation are discussed. Detailed insight originates from experiments in which primary selective excitation with photons or low-energy electrons is combined with selectivity in the detection of the atoms concerning the electronic state of the ejecta, their kinetic energy and angular distribution. Some aspects of the transport of electronic excitation energy to the surface are included.