SINGLE-CRYSTAL GROWTH WITH THE CZOCHRALSKI METHOD INVOLVING ROTATIONAL ELECTROMAGNETIC STIRRING OF THE MELT

被引：31

作者：

BRUCKNER, FU ^{[1
]}

SCHWERDTFEGER, K ^{[1
]}

机构：

[1] TECH UNIV CLAUSTHAL,INST ALLGEMEINE MET,ROBERT KOCH STR 42,D-38678 CLAUSTHAL ZELLERF,GERMANY

来源：

JOURNAL OF CRYSTAL GROWTH | 1994年 / 139卷 / 3-4期

关键词：

D O I：

10.1016/0022-0248(94)90187-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A modified Czochralski technique (EMS-CZ) has been developed to pull single crystals without mechanical rotation of the crystal and the crucible by bringing forth the controlled convection in the melt solely by a rotating electromagnetic field. Crystals of copper, germanium and silicon have been grown successfully with this technique.

引用

页码：351 / 356

页数：6

共 24 条

[1]

BRUCKNER FU, 1993, THESIS TU CLAUSTHAL

[2]

FUJIMORI K, 1971, Patent No. 2107646

[3]

GERDOM KH, 1984, STAHL EISEN, V104, P435

[4] LOW OXYGEN-CONTENT CZOCHRALSKI SILICON CRYSTAL-GROWTH [J].

HOSHIKAWA, K ;

KOHDA, H ;

HIRATA, H ;

NAKANISHI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (01) :L33-L36

[5]

HOSHIKAWAK, 1982, JPN J APPL PHYS, V21, pL545

[6]

ILEBUSI OJ, 1989, MET T A, V20, P1637

[7]

JAUCH R, 1984, STAHL EISEN, V104, P429

[8]

KIM KM, 1987, Patent No. 247297

[9] EFFECTS OF AN EXTERNAL MAGNETIC-FIELD ON SOLUTE DISTRIBUTION IN CZOCHRALSKI GROWN CRYSTALS - A THEORETICAL-ANALYSIS [J].

KOBAYASHI, S .

JOURNAL OF CRYSTAL GROWTH, 1986, 75 (02) :301-308

[10]

KOBAYASHI S, 1986, Patent No. 6360193

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