MEASUREMENT OF THE COMPLEX PERMITTIVITY OF THIN-FILMS IN THE VERY LOW-FREQUENCY RANGE

被引：7

作者：

PISARKIEWICZ, T

机构：

[1] Solid State Phys. Dept., Acad. of Mining and Metall., Cracow

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1979年 / 12卷 / 03期

关键词：

D O I：

10.1088/0022-3735/12/3/019

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A method and an apparatus for measuring the dispersion characteristics of thin-film metal-insulator-metal structures at frequencies below 1 Hz are described. Application of this apparatus makes it possible to study the complex permittivity of thin films having a loss tangent of the order of 10.

引用

收藏

页码：225 / 229

页数：5

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