TIME-DEPENDENT SOLUTION OF BOLTZMANN-EQUATION IN RF PLASMAS - A COMPARISON WITH THE EFFECTIVE FIELD APPROXIMATION

被引：31

作者：

WINKLER, R

DILONARDO, M

CAPITELLI, M

WILHELM, J

机构：

[1] UNIV BARI,CNR,CTR STUDIO CHIM PLASMI,I-70126 BARI,ITALY

[2] UNIV BARI,DEPARTIMENTO CHIM,I-70126 BARI,ITALY

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1987年 / 7卷 / 01期

关键词：

D O I：

10.1007/BF01016003

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：125 / 137

页数：13

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