OPTICAL REFLECTIVITY MEASUREMENTS USING A LASER PLASMA LIGHT-SOURCE

被引：84

作者：

BORTZ, ML ^{[1
]}

FRENCH, RH ^{[1
]}

机构：

[1] DUPONT CO,DEPT CENT RES & DEV,WILMINGTON,DE 19880

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 19期

关键词：

D O I：

10.1063/1.102335

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1955 / 1957

页数：3

相关论文

共 17 条

[1] OPTICAL PROPERTIES OF ALUMINUM OXICE IN VACUUM ULTRAVIOLET
ARAKAWA, ET
WILLIAMS, MW
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1968, 29 (05) : 735 - &
[2] QUANTITATIVE, FFT-BASED, KRAMERS-KRONIG ANALYSIS FOR REFLECTANCE DATA
BORTZ, ML
FRENCH, RH
[J]. APPLIED SPECTROSCOPY, 1989, 43 (08) : 1498 - 1501
[3] BORTZ ML, IN PRESS PHYS SCR, V41
[4] INVESTIGATION OF A LASER-PRODUCED PLASMA VUV LIGHT-SOURCE
BRIDGES, JM
CROMER, CL
MCILRATH, TJ
[J]. APPLIED OPTICS, 1986, 25 (13): : 2208 - 2214
[5] LASER-PRODUCED CONTINUA FOR ABSORPTION-SPECTROSCOPY IN THE VUV AND XUV
CARROLL, PK
KENNEDY, ET
OSULLIVAN, G
[J]. APPLIED OPTICS, 1980, 19 (09): : 1454 - 1462
[6] ABSOLUTELY MEASURED X-RAY-SPECTRA FROM LASER PLASMAS WITH TARGETS OF DIFFERENT ELEMENTS
EIDMANN, K
KISHIMOTO, T
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (07) : 377 - 378
[7] FRENCH RH, IN PRESS PHYS SCR, V41
[8] DEBRIS AND VUV EMISSION FROM A LASER-PRODUCED PLASMA OPERATED AT 150 HZ USING A KRYPTON FLUORIDE LASER
GINTER, ML
MCILRATH, TJ
[J]. APPLIED OPTICS, 1988, 27 (05): : 885 - 889
[9] SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS
GOHIL, P
KAPOOR, H
MA, D
PEKERAR, MC
MCILRATH, TJ
GINTER, ML
[J]. APPLIED OPTICS, 1985, 24 (13): : 2024 - 2027
[10] TIME-RESOLVED MEASUREMENTS OF SHORT-WAVELENGTH FLUORESCENCE FROM X-RAY-EXCITED IONS
KAPTEYN, HC
MURNANE, MM
FALCONE, RW
[J]. OPTICS LETTERS, 1987, 12 (09) : 663 - 665