ALL INSITU DEPOSITION AND CHARACTERIZATION OF YBA2CU3O7-X THIN-FILMS BY LOW-ENERGY-ELECTRON DIFFRACTION AND LOW-ENERGY ION-SCATTERING SPECTROSCOPY

被引：20

作者：

TANAKA, S

NAKAMURA, , T

TOKUDA, H

IIYAMA, M

机构：

[1] Information and Electronics Laboratories, Sumitomo Electric Industries, LTD., Konohana-ku, Osaka 554, 1-1-3, Shimaya

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 23期

关键词：

D O I：

10.1063/1.109132

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In an ultrahigh vacuum apparatus, c-axis oriented YBa2CU3O7-x (YBCO) thin films were deposited by an ozone-assisted reactive coevaporation method and characterized by low-energy electron diffraction (LEED) and low-energy ion scattering spectroscopy (LEISS). A clean surface with crystal perfection within the top two monolayers was confirmed by LEED for the first time. LEISS analysis showed that this clean surface is terminated by Cu ( 1 )-0 chains. These experiments also indicate that the oxygen pressure and the vacuum condition are one of the essential factors in keeping an outermost surface clean.

引用

页码：3040 / 3042

页数：3

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