SUB-MICROMETRIC DISPLACEMENT MEASUREMENTS BY AN ALL-FIBER LASER HETERODYNE INTERFEROMETER USING DIGITAL PHASE DEMODULATION

被引:11
作者
GORECKI, C
机构
[1] Laboratoire D'Optique P. M. Duffieux (URA CNRS No 214), Universite de Franche-Comte, 25030 Besancon Cedex, Route de Gray
来源
JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1995年 / 26卷 / 01期
关键词
HETERODYNE INTERFEROMETRY; VIBRATIONS; PHASE DEMODULATION;
D O I
10.1088/0150-536X/26/1/005
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An optical/digital method using the laser fiber heterodyne interferometry for monitoring of biological motion in the range of 5-500 nm is proposed. A frequency-shifted reference beam is compared with an unshifted test beam that is phase modulated by a vibrating surface. The amplitude of the displacement of vibration motion can be measured down to a level of 1.5 nm by using a direct digital phase demodulation scheme. Some experimental results are presented and discussed.
引用
收藏
页码:29 / 34
页数:6
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