HIGH-CAPACITY LIQUID-PHASE EPITAXY APPARATUS UTILIZING THIN MELTS

被引:6
作者
LORIMOR, OG [1 ]
SAUL, RH [1 ]
DAWSON, LR [1 ]
PAOLA, CR [1 ]
机构
[1] BELL TEL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/0038-1101(73)90085-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1289 / &
相关论文
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