HYDROGEN ABSORPTION CHARACTERISTICS OF AMORPHOUS LANI5.0 FILMS PREPARED BY REACTIVE SPUTTERING

被引：11

作者：

SAKAGUCHI, H ^{[1
]}

TSUJIMOTO, T ^{[1
]}

ADACHI, GY ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL CHEM,SUITA,OSAKA 565,JAPAN

来源：

CHEMISTRY OF MATERIALS | 1993年 / 5卷 / 01期

关键词：

D O I：

10.1021/cm00025a003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An amorphous LaNi5.0 film having high hydrogen density and low hydrogen-induced stress was obtained by means of a reactive sputtering method using an Ar-H2 gas mixture. Pressure-composition isotherms show that the amount of hydrogen (H/LaNi5.0) taken up by a formula weight of LaNi5.0 is about 1.5 times larger for the reactive sputtered film than for the conventional sputtered film prepared by using Ar gas.

引用

页码：6 / 7

页数：2

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