TRIODE CHARACTERISTICS AND VACUUM CONSIDERATIONS OF EVAPORATED SILICON MICRODEVICES

被引：11

作者：

ASLAM, M

KLIMECKY, P

MYERS, GP

BUSTA, HH

ZIMMERMAN, BJ

ARTZ, BE

CATHEY, LW

ELDER, RE

机构：

[1] AMOCO TECHNOL CO,NAPERVILLE,IL 60566

[2] FORD MOTOR CO,RES STAFF,DEARBORN,MI 48121

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 02期

关键词：

D O I：

10.1116/1.586875

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fowler-Nordheim plots of evaporated Si cold emitter arrays, tested in triode configuration at 42 and 300 K, are found to be temperature independent. Fluctuations in emission current decrease with decreasing temperature. Pressure dependence of collector current, measured in a diode configuration for collector voltage range of 90-130 V, shows a sharp decrease if the pressure is raised above 2 X 10(-4) Torr.

引用

页码：422 / 425

页数：4

共 12 条

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