DAMPING CHARACTERISTICS OF BEAM-SHAPED MICRO-OSCILLATORS

被引：325

作者：

HOSAKA, H ^{[1
]}

ITAO, K ^{[1
]}

KURODA, S ^{[1
]}

机构：

[1] CHUO UNIV, DEPT SCI & ENGN, BUNKYO KU, TOKYO 113, JAPAN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 49卷 / 1-2期

关键词：

BEAM-SHAPED MICROACTUATORS; DAMPING CHARACTERISTICS; MICRO-OSCILLATORS;

D O I：

10.1016/0924-4247(95)01003-J

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The damping characteristics of beam-shaped microactuators that oscillate in the transverse direction are analytically evaluated to establish a design method that minimizes energy consumption and increases dynamic performance. The damping force due to airflow is calculated using the Navier-Stokes equation, the accuracy of which is verified by comparing the calculated damping with experimental results. The contributions to the damping due to squeeze force, internal friction, and support loss are calculated by using the Reynolds equation, structural damping theory, and a two-dimensional theory of elasticity, respectively. The final formulae, obtained in simple and closed forms for easy use in the actual design process, are then used to evaluate the relationships between the beam size and the damping ratio of silicon cantilevers, Permalloy cantilevers, and Permalloy spiral springs. Finally, the step response of a Permalloy cantilever is calculated and the relationship between beam size and settling time is determined.

引用

页码：87 / 95

页数：9

共 21 条

[1] AVALLONE EA, 1987, STANDARD HDB MECHANI, P5
[2] DEPENDENCE OF THE QUALITY FACTOR OF MICROMACHINED SILICON BEAM RESONATORS ON PRESSURE AND GEOMETRY
BLOM, FR
BOUWSTRA, S
ELWENSPOEK, M
FLUITMAN, JHJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (01): : 19 - 26
[3] VISCOUS DAMPING MODEL FOR LATERALLY OSCILLATING MICROSTRUCTURES
CHO, YH
PISANO, AP
HOWE, RT
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1994, 3 (02) : 81 - 87
[4] GOTO H, 1992, P JPN SOC PRECISION, P583
[5] HIRANO T, 1992, 2ND P INT SMEAS CONT, P507
[6] HOSAKA H, 1993, INT J JPN S PREC ENG, V27, P253
[7] ELECTROMAGNETIC MICRORELAYS - CONCEPTS AND FUNDAMENTAL CHARACTERISTICS
HOSAKA, H
KUWANO, H
YANAGISAWA, K
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1994, 40 (01) : 41 - 47
[8] HOSAKA H, 1994, J JPN SOC PRECISION, V60, P225
[9] ITAO K, 1994, 10TH P CISM IFTOM S, P329
[10] Jimbo Y., 1968, J HOROLOGICAL I JPN, V47, P1

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