SITE-SPECIFIC PHOTOCHEMICAL-REACTION BY CORE ELECTRON-EXCITATION - CARBON AND OXYGEN K-EDGE FINE-STRUCTURE OF PMMA

被引:20
作者
TINONE, MCK
SEKITANI, T
TANAKA, K
MARUYAMA, J
UENO, N
机构
[1] GRAD UNIV ADV STUDIES, DEPT SYNCHROTRON RADIAT, TSUKUBA 305, JAPAN
[2] NATL LAB HIGH ENERGY PHYS, PHOTON FACTORY, TSUKUBA, IBARAKI 305, JAPAN
[3] CHIBA UNIV, DEPT MAT SCI, CHIBA, JAPAN
关键词
D O I
10.1016/0169-4332(94)90393-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The photon energy dependence of ion desorption from thin films of PMMA was measured in the 250-700 eV photon energy range to investigate the primary steps in radiation induced decomposition using monochromatic pulsed-synchrotron radiation. The desorption of the most intense ions; CH3+, H+, CH2+ and CHO+, depends on the nature of the electronic state created in the primary excitation process. The fragmentation occurs specifically around the site of the atom where the optical excitation took place. The very localized desorption of CH3+, and CH2+ at 288.7 and 535.6 eV, and of CHO+ at 539.3 eV can be very useful for lithographic applications or for future molecular electronic devices fabrication.
引用
收藏
页码:89 / 94
页数:6
相关论文
共 44 条
[1]   INTERACTION OF ION-BEAMS WITH POLYMERS, WITH PARTICULAR REFERENCE TO SIMS [J].
BRIGGS, D ;
HEARN, MJ .
VACUUM, 1986, 36 (11-12) :1005-1010
[2]   A COMPARISON OF POSITIVE AND NEGATIVE-ION STATIC SIMS SPECTRA OF POLYMER SURFACES [J].
BROWN, A ;
VICKERMAN, JC .
SURFACE AND INTERFACE ANALYSIS, 1986, 8 (02) :75-81
[3]   PHOTOTHERMAL DESCRIPTION OF POLYMER ABLATION - ABSORPTION BEHAVIOR AND DEGRADATION TIME SCALES [J].
CAIN, SR ;
BURNS, FC ;
OTIS, CE ;
BRAREN, B .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (11) :5172-5178
[4]  
CHEN CT, 1989, REV SCI INSTRUM, V60, P2533
[5]   VELOCITY DISTRIBUTION OF MOLECULAR FRAGMENTS FROM POLYMETHYLMETHACRYLATE IRRADIATED WITH UV LASER-PULSES [J].
DANIELZIK, B ;
FABRICIUS, N ;
ROWEKAMP, M ;
VONDERLINDE, D .
APPLIED PHYSICS LETTERS, 1986, 48 (03) :212-214
[6]   CHARACTERIZATION OF AZ PN114 RESIST FOR HIGH-RESOLUTION USING ELECTRON-BEAM AND SOFT-X-RAY PROJECTION LITHOGRAPHIES [J].
EARLY, K ;
TENNANT, DM ;
JEON, DY ;
MULGREW, PP ;
MACDOWELL, AA ;
WOOD, OR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2600-2605
[7]   SITE-SPECIFIC FRAGMENTATION OF SMALL MOLECULES FOLLOWING SOFT-X-RAY EXCITATION [J].
EBERHARDT, W ;
SHAM, TK ;
CARR, R ;
KRUMMACHER, S ;
STRONGIN, M ;
WENG, SL ;
WESNER, D .
PHYSICAL REVIEW LETTERS, 1983, 50 (14) :1038-1041
[8]   REINTERPRETATION OF ELECTRON-STIMULATED DESORPTION DATA FROM CHEMISORPTION SYSTEMS [J].
FEIBELMAN, PJ ;
KNOTEK, ML .
PHYSICAL REVIEW B, 1978, 18 (12) :6531-6539
[9]   STATIC SECONDARY ION MASS-SPECTROMETRY OF POLYMER SYSTEMS [J].
GARDELLA, JA ;
HERCULES, DM .
ANALYTICAL CHEMISTRY, 1980, 52 (02) :226-232
[10]   EXCITATION-ENERGY DEPENDENT PHOTOCHEMISTRY NEAR THE CARBON-K EDGE IN POLYMER-FILMS [J].
HANSON, DM ;
ANDERSON, SL ;
NELSON, MC ;
WILLIAMS, GP ;
LUCAS, N .
JOURNAL OF PHYSICAL CHEMISTRY, 1985, 89 (11) :2235-2237