A NEW MULTILEVEL INTERCONNECTION SYSTEM FOR SUBMICROMETER VLSIS USING MULTILAYERED DIELECTRICS OF PLASMA SILICON-OXIDE AND LOW-THERMAL-EXPANSION POLYIMIDE

被引：18

作者：

MISAWA, Y

KINJO, N

HIRAO, M

NUMATA, S

MOMMA, N

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 03期

关键词：

D O I：

10.1109/T-ED.1987.22972

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：621 / 627

页数：7

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