PHASE-FORMATION IN IRON AFTER HIGH-FLUENCE ION-IMPLANTATION

被引：14

作者：

RAUSCHENBACH, B

机构：

[1] Universität Augsburg, Institut für Physik, Experimentalphysik IV, Memminger Str. 6

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷

关键词：

D O I：

10.1016/0168-583X(93)96129-Z

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Composition and phase formation of pure iron implanted with high-energetic nitrogen or boron ions with fluences between 10(16) and 10(18) ions/cm2 have been studied by a variety of analytical techniques. Analysis of the chemical state exhibits on the one side the structural disorder after boron implantation and on the other side the formation of phases and the existence of weakly bound nitrogen after nitrogen implantation. The systems Fe/B and Fe/N have significantly different implantation induced microstructure. The implantation leads to an amorphous or to metastable crystalline phases as function of the ion fluence. The phase formation is connected with the evolution of lateral stresses in the implanted layer.

引用

页码：303 / 308

页数：6

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