MECHANISM OF MICROCRYSTALLINE SILICON GROWTH FROM SILICON TETRAFLUORIDE AND HYDROGEN

被引：18

作者：

OKADA, Y

CHEN, J

CAMPBELL, IH

FAUCHET, PM

WAGNER, S

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 114卷

关键词：

D O I：

10.1016/0022-3093(89)90730-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：816 / 818

页数：3

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