NITRIDING OF TITANIUM IN A RADIO-FREQUENCY DISCHARGE

被引:31
作者
KONUMA, M [1 ]
MATSUMOTO, O [1 ]
机构
[1] AOYAMA GAKUIN UNIV,COLL SCI & ENGN,DEPT CHEM,SETAGAYA KU,TOKYO 157,JAPAN
来源
JOURNAL OF THE LESS-COMMON METALS | 1977年 / 52卷 / 01期
关键词
D O I
10.1016/0022-5088(77)90245-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:145 / 152
页数:8
相关论文
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