ELECTRICAL AND OPTICAL CHARACTERIZATION OF SIC

被引:269
作者
PENSL, G [1 ]
CHOYKE, WJ [1 ]
机构
[1] UNIV PITTSBURGH, DEPT PHYS & ASTRON, PITTSBURGH, PA 15260 USA
关键词
D O I
10.1016/0921-4526(93)90249-6
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We review the current use of electrical and optical methods to study the semiconducting properties of SiC. More specifically we treat Hall measurements, deep-level transient spectroscopy, infrared absorption and luminescence. Some very recent results, not yet available in the literature, on donor and acceptor levels in 3C-SiC, 4H-SiC and 6H-SiC are discussed.
引用
收藏
页码:264 / 283
页数:20
相关论文
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