PREPARATION AND PROPERTIES OF CULNS2 THIN-FILMS PRODUCED BY EXPOSING RF-SPUTTERED CU-IN FILMS TO AN H2S ATMOSPHERE

被引:71
作者
GRINDLE, SP [1 ]
SMITH, CW [1 ]
MITTLEMAN, SD [1 ]
机构
[1] UNIV MAINE,DEPT ELECT ENGN,ORONO,ME 04473
关键词
D O I
10.1063/1.90918
中图分类号
O59 [应用物理学];
学科分类号
摘要
CuInS2 thin films have been made from copper, indium, and hydrogen sulfide gas using a two-step technique which involves exposing Cu-In films produced by sputtering pure copper and pure indium to H2S gas diluted with argon. X-ray diffraction, Auger electron spectroscopy, optical transmission, and electrical measurements were used to identify and characterize the CuInS2. The resulting films were all p type with resistivity in the range 0.1-500 Ω cm and showed a preferred orientation of the (112) plane parallel to the substrate.
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页码:24 / 26
页数:3
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