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GROWTH OF DIAMOND THIN-FILMS BY DC PLASMA CHEMICAL VAPOR-DEPOSITION AND CHARACTERISTICS OF THE PLASMA
被引:79
作者
:
SUZUKI, K
论文数:
0
引用数:
0
h-index:
0
机构:
AOYAMA GAKUIN UNIV,SETAGAYA KU,TOKYO 157,JAPAN
SUZUKI, K
SAWABE, A
论文数:
0
引用数:
0
h-index:
0
机构:
AOYAMA GAKUIN UNIV,SETAGAYA KU,TOKYO 157,JAPAN
SAWABE, A
INUZUKA, T
论文数:
0
引用数:
0
h-index:
0
机构:
AOYAMA GAKUIN UNIV,SETAGAYA KU,TOKYO 157,JAPAN
INUZUKA, T
机构
:
[1]
AOYAMA GAKUIN UNIV,SETAGAYA KU,TOKYO 157,JAPAN
[2]
TOSHIBA CO LTD,CTR RES & DEV,SAIWAI KU,KAWASAKI 210,JAPAN
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
|
1990年
/ 29卷
/ 01期
关键词
:
Chemical vapor deposition;
Diamond;
Langmuir probe method;
Plasma diagnostic;
Thin film;
D O I
:
10.1143/JJAP.29.153
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
Diamond thin films have been formed by dc plasma chemical vapor deposition from a gaseous mixture of methane and hydrogen (gas ratio (CH4/H2); 2/100, total gas pressure; 2.66×104Pa) with a growth rate of ∼20 µm/h. During the course of diamond growth, characteristics of the plasma were measured by the Langmuir single probe method and also by emission spectrometry. From the characterization of the plasma, it was found that the degree of ionization was rather low (∼10-7), and the statistical temperature of hydrogen gas was ∼5×103K. By a thermodynamic investigation at the gas temperature around 5×103K, it was revealed that the source gases (H2and CH4) of over 99% are decomposed to neutral atomic hydrogen and atomic carbon. © 1990 IOP Publishing Ltd.
引用
收藏
页码:153 / 157
页数:5
相关论文
共 17 条
[1]
LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES
[J].
ANGUS, JC
论文数:
0
引用数:
0
h-index:
0
ANGUS, JC
;
HAYMAN, CC
论文数:
0
引用数:
0
h-index:
0
HAYMAN, CC
.
SCIENCE,
1988,
241
(4868)
:913
-921
[2]
HYDROGEN-ATOM DETECTION IN THE FILAMENT-ASSISTED DIAMOND DEPOSITION ENVIRONMENT
[J].
CELII, FG
论文数:
0
引用数:
0
h-index:
0
CELII, FG
;
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
BUTLER, JE
.
APPLIED PHYSICS LETTERS,
1989,
54
(11)
:1031
-1033
[3]
INFRARED DETECTION OF GASEOUS SPECIES DURING THE FILAMENT-ASSISTED GROWTH OF DIAMOND
[J].
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
CELII, FG
;
PEHRSSON, PE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
PEHRSSON, PE
;
WANG, HT
论文数:
0
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0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
WANG, HT
;
BUTLER, JE
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0
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0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
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APPLIED PHYSICS LETTERS,
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[4]
ESTIMATION OF MOLECULAR PARAMETERS OF C/H FRAGMENTS
[J].
COWPERTHWAITE, M
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COWPERTHWAITE, M
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BAUER, SH
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BAUER, SH
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JOURNAL OF CHEMICAL PHYSICS,
1962,
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EQUILIBRIUM COMPOSITION OF C/H SYSTEM AT ELEVATED TEMPERATURES
[J].
DUFF, RE
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DUFF, RE
;
BAUER, SH
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BAUER, SH
.
JOURNAL OF CHEMICAL PHYSICS,
1962,
36
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:1754
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[6]
DYNAMICAL THEORY OF ELECTRON DIFFRACTION IN LAUE-CASE .3. FORBIDDEN REFLECTION
[J].
FUJIMOTO, F
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1960,
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[J].
KAMITSUMA, M
论文数:
0
引用数:
0
h-index:
0
机构:
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
KAMITSUMA, M
;
TEII, S
论文数:
0
引用数:
0
h-index:
0
机构:
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
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[8]
DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
[J].
KAMO, M
论文数:
0
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0
h-index:
0
KAMO, M
;
SATO, Y
论文数:
0
引用数:
0
h-index:
0
SATO, Y
;
MATSUMOTO, S
论文数:
0
引用数:
0
h-index:
0
MATSUMOTO, S
;
SETAKA, N
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[J].
MATSUMOTO, S
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0
MATSUMOTO, S
.
JOURNAL OF MATERIALS SCIENCE LETTERS,
1985,
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(05)
:600
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[10]
MATSUMOTO S, 1982, J APPL PHYS, V21, P483
←
1
2
→
共 17 条
[1]
LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES
[J].
ANGUS, JC
论文数:
0
引用数:
0
h-index:
0
ANGUS, JC
;
HAYMAN, CC
论文数:
0
引用数:
0
h-index:
0
HAYMAN, CC
.
SCIENCE,
1988,
241
(4868)
:913
-921
[2]
HYDROGEN-ATOM DETECTION IN THE FILAMENT-ASSISTED DIAMOND DEPOSITION ENVIRONMENT
[J].
CELII, FG
论文数:
0
引用数:
0
h-index:
0
CELII, FG
;
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
BUTLER, JE
.
APPLIED PHYSICS LETTERS,
1989,
54
(11)
:1031
-1033
[3]
INFRARED DETECTION OF GASEOUS SPECIES DURING THE FILAMENT-ASSISTED GROWTH OF DIAMOND
[J].
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
CELII, FG
;
PEHRSSON, PE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
PEHRSSON, PE
;
WANG, HT
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
WANG, HT
;
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
BUTLER, JE
.
APPLIED PHYSICS LETTERS,
1988,
52
(24)
:2043
-2045
[4]
ESTIMATION OF MOLECULAR PARAMETERS OF C/H FRAGMENTS
[J].
COWPERTHWAITE, M
论文数:
0
引用数:
0
h-index:
0
COWPERTHWAITE, M
;
BAUER, SH
论文数:
0
引用数:
0
h-index:
0
BAUER, SH
.
JOURNAL OF CHEMICAL PHYSICS,
1962,
36
(07)
:1743
-&
[5]
EQUILIBRIUM COMPOSITION OF C/H SYSTEM AT ELEVATED TEMPERATURES
[J].
DUFF, RE
论文数:
0
引用数:
0
h-index:
0
DUFF, RE
;
BAUER, SH
论文数:
0
引用数:
0
h-index:
0
BAUER, SH
.
JOURNAL OF CHEMICAL PHYSICS,
1962,
36
(07)
:1754
-&
[6]
DYNAMICAL THEORY OF ELECTRON DIFFRACTION IN LAUE-CASE .3. FORBIDDEN REFLECTION
[J].
FUJIMOTO, F
论文数:
0
引用数:
0
h-index:
0
FUJIMOTO, F
.
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN,
1960,
15
(06)
:1022
-1029
[7]
THEORY OF A SPHEROIDAL PROBE IN LOW-DENSITY CONTINUUM PLASMAS
[J].
KAMITSUMA, M
论文数:
0
引用数:
0
h-index:
0
机构:
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
KAMITSUMA, M
;
TEII, S
论文数:
0
引用数:
0
h-index:
0
机构:
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
MUSASHI INST TECHNOL,DEPT ELECT ENGN,SETAGAYA KU,TOKYO 158,JAPAN
TEII, S
.
PHYSICS OF FLUIDS,
1982,
25
(07)
:1169
-1173
[8]
DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
[J].
KAMO, M
论文数:
0
引用数:
0
h-index:
0
KAMO, M
;
SATO, Y
论文数:
0
引用数:
0
h-index:
0
SATO, Y
;
MATSUMOTO, S
论文数:
0
引用数:
0
h-index:
0
MATSUMOTO, S
;
SETAKA, N
论文数:
0
引用数:
0
h-index:
0
SETAKA, N
.
JOURNAL OF CRYSTAL GROWTH,
1983,
62
(03)
:642
-644
[9]
CHEMICAL VAPOR-DEPOSITION OF DIAMOND IN RF GLOW-DISCHARGE
[J].
MATSUMOTO, S
论文数:
0
引用数:
0
h-index:
0
MATSUMOTO, S
.
JOURNAL OF MATERIALS SCIENCE LETTERS,
1985,
4
(05)
:600
-602
[10]
MATSUMOTO S, 1982, J APPL PHYS, V21, P483
←
1
2
→