GROWTH OF SILICON-CARBIDE CRYSTALS BY VAPOR-LIQUID-SOLID (VLS) MECHANISM IN SUBLIMATION METHOD

被引:15
作者
TAIROV, YM [1 ]
TSVETKOV, VF [1 ]
KHLEBNIKOV, II [1 ]
机构
[1] ELECTROTECH INST, 5 PROFESSOR POPOV ST, LENINGRAD, USSR
关键词
D O I
10.1016/0022-0248(73)90130-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:155 / 157
页数:3
相关论文
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