MAGNETIC AND STRUCTURAL-PROPERTIES OF HIGH-RATE DUAL ION-BEAM SPUTTERED NIFE FILMS

被引：19

作者：

LO, J

HWANG, C

HUANG, TC

CAMPBELL, R

ALLEE, D

机构：

[1] IBM RES,ALMADEN RES CTR,SAN JOSE,CA 95120

[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.338713

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3520 / 3525

页数：6

共 23 条

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[9] DEPOSITION OF RUST PROOF IRON THIN-FILMS WITH SOFT MAGNETIC-PROPERTIES BY DUAL ION-BEAM SPUTTERING [J].

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