LOW-CONCENTRATION OXYGEN DEPTH PROFILING BY O-16(D,ALPHA)N-14 REACTION

[1] Amsel G., 1963, THESIS

[2] AMSEL G, 1964, ANN PHYS-PARIS, V9, P247

[3] BARCZ A, 1976, ION BEAM SURFACE LAY, P407

[4] BORDERS JA, 1978, NUCL INSTRUM METHODS, V149, P279, DOI 10.1016/0029-554X(78)90873-X

[5] THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS [J]. THIN SOLID FILMS, 1973, 19 (01) : 121 - 135

[6] PICRAUX ST, 1974, JPN J APPL PHYS, P657

[7] USE OF NUCLEAR-REACTION O-16(D,ALPHA)N-14 IN MICROANALYSIS OF OXIDE SURFACE-LAYERS [J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03): : 605 - 610

[1] Amsel G., 1963, THESIS

[2] AMSEL G, 1964, ANN PHYS-PARIS, V9, P247

[3] BARCZ A, 1976, ION BEAM SURFACE LAY, P407

[4] BORDERS JA, 1978, NUCL INSTRUM METHODS, V149, P279, DOI 10.1016/0029-554X(78)90873-X

[5] THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS [J]. THIN SOLID FILMS, 1973, 19 (01) : 121 - 135

[6] PICRAUX ST, 1974, JPN J APPL PHYS, P657

[7] USE OF NUCLEAR-REACTION O-16(D,ALPHA)N-14 IN MICROANALYSIS OF OXIDE SURFACE-LAYERS [J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03): : 605 - 610