AMORPHOUS-CRYSTALLINE PHASE-TRANSFORMATION OF SUPPORTED AGGREGATES PRODUCED BY INDIUM DEPOSITION

被引：5

作者：

TREILLEUX, M

FUCHS, G

AIRES, FS

MELINON, P

HOAREAU, A

CABAUD, B

机构：

[1] Département de Physique des Matériaux, Unité Associée au CNRS, Université Claude Bernard-Lyon I, 69622 Villeurbanne Cédex, 43 boulevard du

来源：

THIN SOLID FILMS | 1990年 / 191卷 / 01期

关键词：

D O I：

10.1016/0040-6090(90)90278-L

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium deposits on amorphous carbon grids have been produced by atomic deposition in a vacuum chamber evacuated at a pressure of 1 × 10-4 Pa. Deposits of 2 nm thickness corresponding to 7.6 × 1015 atoms cm-2 appear to be formed from small isolated amorphous aggregates. In situ thermal annealing in a transmission electron microscope induces an amorphous-crystalline phase transformation. A similar phase change caused by the electron beam of the microscope is also observed, at an atomic scale, by high resolution electron microscopy. In both cases the phase obtained after transformation is In2O3. © 1990.

引用

页码：127 / 133

页数：7

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