PREPARATION OF THIN-FILM HIGH-TEMPERATURE SUPERCONDUCTORS

被引：32

作者：

XI, XX

VENKATESAN, T

LI, Q

WU, XD

INAM, A

CHANG, CC

RAMESH, R

HWANG, DM

RAVI, TS

FINDIKOGLU, A

HEMMICK, D

ETEMAD, S

MARTINEZ, JA

WILKENS, B

机构：

[1] BELLCORE,RED BANK,NJ 07701

[2] UNIV CALIF LOS ALAMOS SCI LAB,ERDC,LOS ALAMOS,NM 87545

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1991年 / 27卷 / 02期

关键词：

D O I：

10.1109/20.133345

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fundamental issues in preparing high quality high T(c) YBa2Cu3O7-x thin films are addressed. The techniques of inverted cylindrical magnetron sputtering and pulsed laser deposition are chosen as successful examples to illustrate how the key problems can be solved. The fabrication of YBa2Cu3O7-x/PrBa2Cu3O7-x superlattices where superconductivity in a single unit cell layer of YBa2Cu3O7-x was observed demonstrates the state of the art of thin film deposition of high T(c) materials. Systematic variations of the deposition parameters result in changes of superconducting and structural properties of the films that correlate with their microwave and infrared characteristics.

引用

页码：982 / 989

页数：8

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