Using a scanning Auger microscope at 100 kev primary beam energy it has been possible to analyse a dispersed catalyst particle by particle. The elemental analysis of a 8 nm particle has been obtained for which the number of Pd atoms being detected is estimated to be less than 4000, leading to a detectable mass of 7×10-19g. A silicon sub-monolayer buried in a GaAs matrix has also been detected, operating at oblique incidence with a 20 nm beam size (minimum detectable concentration -3). These preliminary experiments illustrate the potential of performing Auger spectroscopy at unconventional primary beam energies (with a field emission gun) when high lateral resolution is required.
机构:
LA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIALA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIA
SZAJMAN, J
LECKEY, RCG
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机构:
LA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIALA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIA
机构:
LA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIALA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIA
SZAJMAN, J
LECKEY, RCG
论文数: 0引用数: 0
h-index: 0
机构:
LA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIALA TROBE UNIV, ELECTRON SPECTROSCOPY RES CTR, BUNDOORA, VIC 3083, AUSTRALIA