共 7 条
[1]
LASER SCANNING TECHNIQUE FOR THE DETECTION OF RESISTIVITY AND LIFETIME INHOMOGENEITIES IN SEMICONDUCTOR-DEVICES
[J].
PHYSICA SCRIPTA,
1978, 18 (06)
:357-363
[3]
NAKAGAWA A, 1986 IEEE IEDM, P122
[4]
OHASHI H, 1987 IEEE IEDM, P678
[6]
SILICON-TO-SILICON DIRECT BONDING METHOD
[J].
JOURNAL OF APPLIED PHYSICS,
1986, 60 (08)
:2987-2989
[7]
XU XL, 1987 P ESSDERC BOL, P403