HARD X-RAY MICROSCOPE WITH SUBMICROMETER SPATIAL-RESOLUTION

被引：19

作者：

KURIYAMA, M ^{[1
]}

DOBBYN, RC ^{[1
]}

SPAL, RD ^{[1
]}

BURDETTE, HE ^{[1
]}

BLACK, DR ^{[1
]}

机构：

[1] BROOKHAVEN NATL LAB, NATL SYNCHOTRON LIGHT SOURCE, UPTON, NY 11973 USA

来源：

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1990年 / 95卷 / 05期

关键词：

CCD DETECTORS; FIBER REINFORCED COMPOSITE; MICROTOMOGRAPHY; MULTILAYER FILMS; X-RAY LENS; X-RAY MICROSCOPE;

D O I：

10.6028/jres.095.044

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6 mu-m in width, and resolving line pairs 1.2-mu-m wide and 1.2-mu-m apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resolution. Principles of x-ray image magnification are discussed based on x-ray optics and diffraction physics. Examples of applications are shown in microradiography with fiber reinforced composite materials (SiC in Ti3A1 Nb) and in diffraction imaging (topography) with device patterns on a silicon single crystal. High-resolution tomography has now become a reality.

引用

页码：559 / 574

页数：16

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