A SIMPLE-MODEL FOR THE AUGER-ELECTRON SPECTROSCOPY EVALUATION OF THIN-FILM LAYER GROWTH SYSTEMS IN WHICH SUBSTRATE OVERGROWTH ATOM MIXING OCCURS

被引:6
作者
ECE, M
VOOK, RW
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575627
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:1036 / 1039
页数:4
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